JPH0176035U - - Google Patents

Info

Publication number
JPH0176035U
JPH0176035U JP1987171740U JP17174087U JPH0176035U JP H0176035 U JPH0176035 U JP H0176035U JP 1987171740 U JP1987171740 U JP 1987171740U JP 17174087 U JP17174087 U JP 17174087U JP H0176035 U JPH0176035 U JP H0176035U
Authority
JP
Japan
Prior art keywords
gas
glow discharge
cleaning
ratio
discharge decomposition
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1987171740U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1987171740U priority Critical patent/JPH0176035U/ja
Publication of JPH0176035U publication Critical patent/JPH0176035U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Drying Of Semiconductors (AREA)
JP1987171740U 1987-11-10 1987-11-10 Pending JPH0176035U (en])

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1987171740U JPH0176035U (en]) 1987-11-10 1987-11-10

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1987171740U JPH0176035U (en]) 1987-11-10 1987-11-10

Publications (1)

Publication Number Publication Date
JPH0176035U true JPH0176035U (en]) 1989-05-23

Family

ID=31463753

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1987171740U Pending JPH0176035U (en]) 1987-11-10 1987-11-10

Country Status (1)

Country Link
JP (1) JPH0176035U (en])

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